| Chemical Name | TRIS(TRIMETHYLSILYL) PHOSPHATE |
| Synonyms | Phosphoric acid, TMSP, Phosphoric acid |
| CAS# | 10497-05-9 |
| Molecular Formula | C9H27O4PSi3 |
| Structure |  |
| Molecular Weight | 314.54 |
| Physical State | Liquid |
| Color | Colorless |
| Chemical Name | TRIS(TRIMETHYLSILYL) PHOSPHATE |
| Boiling Point（℃） | 228-229 |
| Density（g/ml） | 0.945 |
| Refractive Index (n20/D) | 1.409 |
| Flash Point（℃） | 13 |
| Packaging Type | Packing Specification |
| Steel Drum | 25 kg |
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