Iodotrifluoromethane (CF3I) is an environmentally friendly dry etching gas with low GWP，mainly used in front end etching process of flash memory chips manufacturing.
| Chemical Name | Iodotrifluoromethane |
| Synonyms | Trifluoroiodomethane |
| CAS # | 2314-97-8 |
| ELINCS # | 219-014-5 |
| Molecular Formula | CF3I |
| Structure | CF3-I |
| Molecular Weight | 195.91 |
| Physical State | Gas |
| Color | Colourless |
| Odor | Odorless |
| ODP（CFC-11 = 1） | ≈ 0 |
| GWP100（CO2 = 1） | < 1 |
| Life Time (Days) | <5 |
| TWA（8-hr） | 150 ppm |
| Chemical Name | Iodotrifluoromethane |
| Boiling Point(℃) | -22.5 |
| Melting Point(℃) | -110 |
| Liquid Density（@25 ℃, g/cm3） | 2.096 |
| Vapor Pressure（@20 ℃，MPa） | 0.472 |
| Critical Temperature（℃） | 122 |
| Critical Pressure（MPa） | 4.04 |
| Critical Volume（cm3/mole） | 225 |
| Flash Point（℃） | Not applicable |
| Flammability（@21 ℃） | Not applicable |
| Explosion Limit（%vol) | Not applicable |
| Purity | 99.9% | 99.99% |
| Cylinder Size | Valve Type | Filling Weight |
| 10.2L | CGA 350 / DISS 724 | 10 kg |
| 44L | CGA 350 / DISS 724 | 44 kg |
| 47L | CGA 350 / DISS 724 | 47 kg |
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